我们提出了超紧凑型中波红外光电探测器像素的设计、制备和光学表征。设计基于引导模式共振结构，将入射的中红外光限制在全外延生长材料堆栈的250纳米厚吸收区域，并采用混合腔-引导模式共振结构在横向方向上约束模式。预测结果显示，这种具有亚波长厚度和接近两倍自由空间工作波长的横向尺寸的像素，外部量子效率可达到约50%。我们的研究为真正紧凑的中波红外像素打开了大门，这些像素结合了低暗电流、室温操作和小横向尺寸的优点。

We present the design, fabrication, and optical characterization of ultra-compact mid-wave infrared photodetector pixels. Our design relies on a guided mode resonance structure to confine incident mid-infrared light to the 250 nm-thick absorber region of all-epitaxially-grown material stack, and a hybrid cavity-guided mode resonance to confine the mode in the lateral direction. The resulting pixel, with deep subwavelength thickness and lateral dimensions on the order of almost two times free space operating wavelength is predicted to achieve external quantum efficiency of the order of 50%. Our work opens the door for truly compact mid-wave infrared pixels that offer the combined benefits of low dark current, room temperature operation, and small lateral size.