基于光热离子碳纳米管阴极的低成本紧凑型电子显微镜的概念与演示

Concept and Demonstration of a Low-cost Compact Electron Microscope Enabled by a Photothermionic Carbon Nanotube Cathode

摘要 Abstract

扫描电子显微镜(SEM)能够提供高分辨率、高景深以及图像质量,仿佛肉眼直接观察微观物体一般。这使其不仅成为一种强大的科学仪器,而且是一种天然适用于几乎所有涉及小尺度研究领域的工具。然而,电子显微镜仍然复杂且昂贵,许多领域无法触及。为了扩大其应用范围,我们展示了一种采用简单、低成本、现成组件以及业余级别的电机构建的SEM;这一成果得益于一种独特的基于碳纳米管阵列的热离子电子源,该源由低光学功率激发。该设备提供了亚微米级分辨率、数百微米的景深,并且图像质量可与商用SEM相媲美;它还能够耐受较差的真空环境和潮湿样品,具有广泛的适用性。其设计灵活,易于根据不同应用场景进行定制。本文提供了概念方法和高级设计;我们特定实现的具体蓝图将在网上另行提供。我们希望专业人员和非专业人士都能构建适合自身需求和兴趣的变体,帮助电子显微镜扩展到社会和工业的多样化新领域。

The scanning electron microscope (SEM) delivers high resolution, high depth of focus and an image quality as if microscopic objects are seen by the naked eye. This makes it not only a powerful scientific instrument, but a tool inherently applicable to nearly all fields of study and curiosity involving the small scale. However, SEMs have remained complex, expensive, and beyond the reach of many. To broaden access, we demonstrate an SEM using simple, low-cost, off-the-shelf components, and hobby-level electromechanics; this has been enabled by a unique thermionic electron source based on a carbon nanotube array excited by low optical power. The instrument offers sub-micrometer resolution, a depth of focus of several hundred micrometers, and an image quality comparable to commercial SEMs; it also tolerates poor vacuum and moist specimens, making it broadly applicable. It has a flexible design that lends itself to easy customization for different use scenarios. We provide the conceptual approach and high-level design in this paper; the detailed blueprints of our specific implementation will be provided separately online. We hope that specialists and non-specialists alike will build variations that fit their own needs and interests, helping electron microscopy expand into diverse new sectors of society and industry.

基于光热离子碳纳米管阴极的低成本紧凑型电子显微镜的概念与演示 - arXiv